Thought - Design - Mechanics - Electronics - Mechanical & Electrical Refinement - "Finer" Mechanics (ex. balancing of the body) - Basic Programming (ex. limb movement, fundamental mechanic/electric regulation) - Further Mechanical and Electrical Refinement - Advanced Programming (ex. rudimentary sensory interaction and programmatical refinement of mechanical and electrical regulation) - Fine Tuning of All Systems (this part keeps going forever) - Basic Intelligence (ex. use of sensory input and beginnings of basic output including actual locomotion)
From there you just continue development of the intelligence until you get to a point where you feel comfortable with the basics and its abilities in the input - output fields. Then you can look for ways to automate those things, which can expand into the massive mess of self awareness or the simulation of it, which I don't know that I can simplify into a one or two word category.
The rest I guess you could stick in a new category for "personality", which might include all the other scifi stuff everybody's always on about, emotions, and the like.
I'm sure there's also other, really important things I missed, I haven't really given this too much thought in the past few years.